Saturated perfluorocarbons (PFCs) are used as dry-etch gases in the fabrication of ultralarge-scale integrated circuits (ULSIs) in the semiconductor industry. These gases have long atmosphere lifetimes and strong absorptions of infrared radiation, exhibiting high global warming potentials (GWPs) and so promoting the green house effect. Recently, the replacement, decomposition or recycling of PFCs used for dry-etch gases has been attempted to reduce the greenhouse effect. Table I summarizes the GWP100 and atmospheric lifetime of PFC alternative candidates. It should be noted that C4F6 has much lower GWP100 value and atmospheric lifetime than others.
Table I. Molecular structure, global warming potential (GWP100) and atmospheric lifetime for octafluorocyclopropane(c-C4F8), hexafluoropropene (C3F6), hexafluorobutadiene (C4F6), octafluoro-2-butene (C4F8) and octafluoropentadiene (C5F8).
Beijing Yuji Technology & Technology Co., Ltd. offers the new generation fluorine electronic specialgas C4F6 (Hexafluoro-1,3-butadiene, HFBD). After many years of research and development, Beijing Yujihas designed the production line of C4F6, and has gone into mass production successfully.
DOT Cylinder volume: 10L, 47L;
Valve Outlet: CGA350, DISS724.
*Other cylinder connections are also available, please contact your area representative.
Typical application advantages:
(1) higher etching rate (C/F ratio as high as 67%).
(2) higher selectivity to photoresist and silicon nitride.