Quanzhou Yuji: Your Trusted Supplier of Fluorinated Electronic Gases

2024-03-19 09:04

The biggest semiconductor event in China, Semicon China 2024, will be held at Shanghai New International Expo Centre from March 20 to March 22. As a leading provider of fluorinated electronic gases, Quanzhou Yuji Advanced Materials Co., Ltd. will be showcasing our latest electronic gases products at booth E7-2377. We warmly welcome all our clients and prospective clients to visit our booth.


The purity and stability of electronic gases play a critical role in the manufacturing of electronic components, impacting the production yield and performance of microchips. As microchip processes advance from 14nm to 7nm and beyond, the need for highly pure and stable electronic gases becomes increasingly important. Simultaneously, the global economy’s shift towards low-carbon and eco-friendly initiatives is steering the microchip industry towards a sustainable ‘green’ trajectory.


Through years of innovative research and continuous investment, Quanzhou Yuji has developed innovative manufacturing technologies for electronic gases, achieving significant advancements in raw material synthesis, purification, analysis, and ultra clean filling. The company has established a comprehensive analysis platform and efficient purification facilities, as well as developed low-temperature distillation, low-temperature adsorption, and other purification technologies. Each step undergoes strict quality control to ensure the delivery of stable, high-quality electronic gases to the customers.


Quanzhou Yuji offers a diverse selection of fluorinated electronic gases designed for advanced etching processes in 14nm chips and smaller, providing great etching capabilities while maintaining environmental sustainability. The majority of our gases have zero Ozone Depletion Potential (ODP) and low Global Warming Potential (GWP) values. Our products line includes 5N purity of fluoromethane, trifluoromethane, octafluorocyclobutane, as well as eco-friendly gases tailored to specific etching requirements such as narrow line widths and high aspect ratios. With our comprehensive product portfolio covering all major electronic gases, we can help customers reduce procurement costs and enhance efficiency in supply chain management.


Some of Our Products


  1. Hexafluoro-1,3-butadiene(C4F6

Known as a competitive next-generation etching gas in the semiconductor industry, Hexafluoro-1,3-butadiene is highly regarded for its performance in dry etching processes. It stands out for its ability to achieve narrow etching linewidths, high aspect ratios, and the formation of protective polymer films on sidewalls. Particularly effective at the 0.13μm technology level, the gas offers advantages such as superior selectivity to photoresist and nitride silicon compared to C4F8, resulting in significant enhancements in production yields. The gas can also be utilized as a substitute for CF4 in dry processes to precisely etch semiconductor capacitor patterns using KrF laser technology. Additionally, the gas has a low global warming potential (GWP100 < 1).


  1. Trifluoromethyl iodide(CF3I)


This is a high-end etching gas that significantly enhances etching precision through the synergistic action of I2 and fluorocarbon polymer deposition. The introduction of I reduces molecular ionization energy, facilitating the formation of F plasma and increasing etching rates. This gas is applied in the manufacturing of advanced integrated circuits with line widths of 7nm and below, ensuring precise results. CF3I is environmentally friendly with a low global warming potential (GWP100<1). Additionally, it can serve as a cleaning gas for CVD reaction chambers.


  1. Fluoromethane(CH3F)


This is a highly efficient and environmentally friendly etching gas, with a GWP100 of 116, the gas is designed for the precise etching of nitride and silicide films in advanced semiconductor manufacturing processes. Yuji offers 5N purity of Fluoromethane as well as customization options to selectively remove impurities based on customer requirements.



For more information, please visit Quanzhou Yuji’s website