The purity of electronic gases is crucial to the semiconductor industry, directly impacting chip performance and production yield. Through ongoing research and innovation, Quanzhou Yuji Advanced Materials has made significant advancements in electronic specialty gases, developing hexafluorobutadiene (C4F6)—a key material for advanced semiconductor processes—at an industry-leading 5N purity (99.999%). This breakthrough enables stable mass production and has gained strong customer recognition.
C4F6 is emerging as a leading etching gas, offering several advantages over traditional gases like C4F8. It provides higher selectivity for photoresists and silicon nitride, improving product yield. C4F6 also replaces CF4 in dry etching processes for KrF laser sharp patterning in semiconductor capacitors.
·Etching Performance: Narrow etch linewidths, high depth-to-width ratios.
·Environmental Performance: GWP < 1.
Achieving 5N purity in C4F6 brings several advantages:
With over 30 years of experience, Yugi has developed a robust catalyst system to support the synthesis and industrial-scale production of high-purity fluorinated gases.
Yuji combines advanced synthesis and purification in a seamless “Synthesis + Ultra-Pure” system, ensuring quality control from raw materials to finished products.
Yuji applies strict quality control across supply chain, production, purification, testing, packaging and delivery—ensuring stable supply and consistent purity.
Achieving 5N purity requires precise purification techniques and rigorous impurity control. Yuji’s leading analytical capabilities enable thorough testing throughout the process, maintaining product integrity.
Yuji continues to set industry standards with its modern digitalized manufacturing facility. Through advanced factory management platforms, the company ensures traceability, coordinated production, quality compliance, and optimized logistics, enhancing operational efficiency across the supply chain.
In recent years, Yuji has introduced fluorinated etching gases that combine excellent technical performance with lower environmental impact, supporting the semiconductor industry’s shift toward more sustainable materials.
Yuji remains committed to advancing fluoromaterials innovation and helping customers achieve their low-carbon and sustainable development goals.
