High purity Hexafluoropropylene C3F6 with the purity 4N Introduction

2020-05-26 11:49

Yuji is one of the manufacturers of fluorine-containing chemicals and specializes in R&D, production and sale of special fluorinated chemicals. We are good at gas/liquid phase halogenation reaction. Based on the design of fluoride synthesis route, preparation & purification technology, Yuji can undertake the commissioned development of new fluoride, bromide and iodide derivatives according to customers’ needs. To meet the needs of etching gas Hexafluoropropylene C3F6 in semiconductor industry, Yuji developed the purification process of Hexafluoropropylene (C3F6), whose purity can arrive Grade 4N (99.99%).

Hexafluoropropylene C3F6, also known as perfluoropropylene and HFP, is a colorless, odorless, nonflammable liquefied gas. It is an environmentally friendly perfluorocarbon compound (PFC) with a low GWP. HFP can be applicable in electronics, semiconductor process, dopant, etchant, reactant, fabrication, reactors and silicon-precursor, ect..

The gas data and shipping information for HFP(C3F6) are as follows:

Gas Data

Molecular Weight: 150.02
Formula: CF3CF=CF2
Boiling point: -29℃
Density: 6.24 kg/m3 @20°C, 101.325 kPa

0.388 lb/ft3 @68°F, 14,696 psia

Specific Volume: 0.161 m3/kg @ 21.1°C, 101.325 kPa

2.58 ft3/lb @ 70°F, 14.696 psia

GWP: <100
Atmospheric lifetime: 6 days
Toxic level: LC50=750


CAS Registry Number: 116-15-4
UN Number: UN 1858
DOT Proper Shipping Name: Hexafluoropropylene, Compressed
DOT Classification: 2.2 (Nonflammable Gas)